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| 热丝CVD方法中气体状态参数的二维模拟计算 |
| 汪爱英; 孙超;黄荣芳;闻立时 |
| 中国科学院金属研究所 |
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引用本文:
汪爱英; 孙超; 黄荣芳; 闻立时 . 热丝CVD方法中气体状态参数的二维模拟计算[J]. 材料研究学报, 2003, 17(4): 347-352.
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