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| Fabrication and sintering of Pt electrode deposited by screen printing method |
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Cite this article:
;. Fabrication and sintering of Pt electrode deposited by screen printing method. Chin J Mater Res, 2008, 22(5): 479-484.
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Abstract Single layer and double layer Pt bottom electrodes for functional ceramic thick films have been screen printed on alumina substrates. The effects of sintering temperature, heating rate, and thickness of the Pt electrode layer on the pattern, alumina surface coverage, and the roughness of the electrode layer have been studied. The mechanism of grain and pore growth and densification of the Pt layer is also demonstrated. The difference in activation energy and the diffusion can be due to the presence of carbon impurities, whick influences the diffusion of Pt at low temperatures. As the first layer sintered at 600℃, the double print Pt layers with sequential heat treatments at 1200℃ exhibt improved densification and surface coverage. The double print Pt layers with the minimum average roughness of 0.82μm and the smallest sheet resistivity of 0.044have been produced on alumina substrates.
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Received: 16 January 2008
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