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Chin J Mater Res  1998, Vol. 12 Issue (2): 139-143    DOI:
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LOW TEMPERRTURE COFIRED AIN MULTILAYER SUBSTRATES
WU Yin; MIAO Weiguo;LIU Yaocheng;ZHOU Heping(Depart.of Materials and Engineering of Tsinghua University; Beijing 100084 )
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WU Yin; MIAO Weiguo;LIU Yaocheng;ZHOU Heping(Depart.of Materials and Engineering of Tsinghua University; Beijing 100084 ). LOW TEMPERRTURE COFIRED AIN MULTILAYER SUBSTRATES. Chin J Mater Res, 1998, 12(2): 139-143.

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Abstract  A kind of low temperature cofired AIN multilayer substrates was introduced which consist of high thermal conductivity of AIN ceramics and metal W. The influence of doping system with Dy2O3 on the low temperature AIN characteristics and microstructure was
Key words:  aluminum nitride      low temperature cofire      multilayer substrate      thermal conductivity     
Received:  25 April 1998     
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