Chin J Mater Res  1991, Vol. 5 Issue (3): 247-251    DOI:

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LOW-TEMPERATURE Hg SENSITIZED PHOTOCHEMICAL VAPOR DEPOSITED Si_3N_4 FILMS

JING Junhai SUN Qing FU Junxing SUN Jiancheng (University of Electronics Science and Technology of Xi'an)

JING Junhai SUN Qing FU Junxing SUN Jiancheng (University of Electronics Science and Technology of Xi'an). LOW-TEMPERATURE Hg SENSITIZED PHOTOCHEMICAL VAPOR DEPOSITED Si_3N_4 FILMS. Chin J Mater Res, 1991, 5(3): 247-251.

Abstract References Related Articles Recommended Metrics Download:  PDF(379KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Si_3N_4 films have been deposited on Si wafers at temperature range of 100—200℃ by photo-CVD technique.This paper presents the relationship between the deposi-tion rate and other deposition parameters of the films.The physical,chemical and mechani-cal pro Key words:  low-temperature      Hg sensitizing      photo-CVD      Si_3N_4      films      Received:  25 June 1991      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y1991/V5/I3/247 1 Padmanabhan R et al.J Vac Sci Technol,1988;A6;2226 2 Bertl M et al.Thin Solid Films,1988;165:279 3 Peters J W et al.Solid State Technology,1980;9:121 4 Ehrlich D J et al.Appl Phys Lett,1981;38;946 5 Sinha A K et al.J Electrochem Soc,1978;125:601 6 金原粲,藤原英夫著,王力衡,郑海涛译.薄膜.北京:电子工业出版社,1988:13 [1] SHAO Siwu, ZHENG Yuting, AN Kang, HUANG Yabo, CHEN Liangxian, LIU Jinlong, WEI Junjun, LI Chengming. Progress on Application of Bias Technology for Preparation of Diamond Films[J]. 材料研究学报, 2022, 36(3): 161-174. [2] ZHU Haiyong, ZHANG Wei. Effect of Mn Doping and Niobium Oxide Seed Layer on Electrical Properties of Potassium Sodium Niobate Thin Films[J]. 材料研究学报, 2022, 36(12): 945-950. [3] CUI Li, SUN Lili, GUO Peng, MA Xin, WANG Shuyuan, WANG Aiying. Effect of Deposition Time on Structure and Performance of Diamond-like Carbon Films on PEEK[J]. 材料研究学报, 2022, 36(11): 801-810. [4] LI Xiuxian, QIU Wanqi, JIAO Dongling, ZHONG Xichun, LIU Zhongwu. Promotion Effect of α-Al2O3 Seeds on Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering[J]. 材料研究学报, 2022, 36(1): 8-12. [5] WANG Peng, LU Xilong, CAO Chun-e, CHEN Yunxia, SHEN Huarong, ZHANG Xu. Influence of Nucleation-growth Liquid-liquid Phase Partition on Properties of Lead-free Low Temperature Frit[J]. 材料研究学报, 2021, 35(9): 657-666. [6] XIONG Wenwen, HE Song, ZHENG Songsheng, CHENG Qijin, SHENG Hongxun, CHEN Chao. Preparation of Diamond-like Carbon Films on Top and Bottom Plates by RF-PECVD[J]. 材料研究学报, 2021, 35(2): 154-160. [7] SONG Guihong, LI Xiuyu, LI Guipeng, DU Hao, HU Fang. Thermoelectric Properties of Mg-rich Mg3Bi2 Films Prepared by Magnetron Sputtering[J]. 材料研究学报, 2021, 35(11): 835-842. [8] LI Guipeng, SONG Guihong, HU Fang, DU Hao, YIN Lisong. Structure and Thermoelectric Properties of Ag-doped SnSe Thin Films Deposited by Magnetron Sputtering[J]. 材料研究学报, 2020, 34(8): 561-568. [9] WANG Shiqi,HUO Wenyi,XU Zhengchao,ZHANG Xuhai,ZHOU Xuefeng,FANG Feng. Fabrication of Films of Co Doped TiO2 Nanotube Array and their Photocatalytic Reduction Performance[J]. 材料研究学报, 2020, 34(3): 176-182. [10] Dong ZHANG,Peiling KE,Aiying WANG,Xiangyong WANG,Li ZHI. Properties of Functional Decorative Silicon Oxide Films Prepared by PECVD[J]. 材料研究学报, 2019, 33(6): 467-474. [11] Yongping WANG,Zijun DING,Bao ZHU,Wenjun LIU,Shijin DING. Plasma-enhanced Atomic Layer Deposition of TaN Film and Its Resistance to Copper Diffusion[J]. 材料研究学报, 2019, 33(1): 9-14. [12] Shengwen ZHONG, Huajun ZHANG, Wenli YAO, Qian ZHANG, Yukun FU, Xiaodong TANG. Preparation and Electrochemical Performance of LiNi0.5Mn0.5-xCoxO2(0≤x≤0.12) Cathode Materials[J]. 材料研究学报, 2018, 32(7): 487-494. [13] Shengsheng ZHAO, Yanhui ZHAO, Wei CHEN, Jiaxi FEI, Tiegang WANG. Effect of Axial Magnetic Field on Property of TiN/Cu Films Deposited by Arc Ion Plating[J]. 材料研究学报, 2018, 32(5): 381-387. [14] Wanqi QIU, Shulin WANG, Yitian CHENG, Zhongwu LIU, Xichun ZHONG, Dongling JIAO, Kesong ZHOU. Low-temperature Deposition of α-(Al,Cr)2O3 Films by Reactive Sputtering Method[J]. 材料研究学报, 2018, 32(4): 278-282. [15] Yayun ZHANG, Jinshan WEI, Tongbang AN, Yusong XU, Chengyong MA. Effect of Heat Input on Low-temperature Flexibility of Weld Seams of a Hull Steel via Gas-shielded Welding with Filler of Marine High Strength Flux-cored Wire[J]. 材料研究学报, 2018, 32(4): 309-314. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed