STRUCTURE OF Sb AND Pb FILMS DEPOSITED BY IONIZED CLUSTER BEAM

Chin J Mater Res

1989, Vol. 3

Issue (5): 419-424 DOI:

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STRUCTURE OF Sb AND Pb FILMS DEPOSITED BY IONIZED CLUSTER BEAM

HE Zhigang FENG Jiayou TANG Haipeng FAN Yudian LI Hengde (Tsinghua University)

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HE Zhigang FENG Jiayou TANG Haipeng FAN Yudian LI Hengde (Tsinghua University). STRUCTURE OF Sb AND Pb FILMS DEPOSITED BY IONIZED CLUSTER BEAM. Chin J Mater Res, 1989, 3(5): 419-424.

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Abstract The paper studies systematically the deposiion at Sb and Pb filmswith an ionized cluster beam set-up.The dependences of the orientationdegree of the grains in the film on the substrate temperature,the ionization cu-rrent and the acceleration voltage are d

Key words: ionized cluster beam process films film structure

Received: 25 October 1989

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