Chin J Mater Res  1998, Vol. 12 Issue (4): 369-374    DOI:

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THE PREMRAfION OF ORIENTED AlN NANOMETER THIN FILMS BY MICROWAVE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

XIE Song; MENG Guangyao; PENG Dingkun (Department of Materials Science and Engineering)University of Science and Technology of China; Hefei 230026)

XIE Song; MENG Guangyao; PENG Dingkun (Department of Materials Science and Engineering)University of Science and Technology of China; Hefei 230026). THE PREMRAfION OF ORIENTED AlN NANOMETER THIN FILMS BY MICROWAVE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION. Chin J Mater Res, 1998, 12(4): 369-374.

Abstract References Related Articles Recommended Metrics Download:  PDF(1080KB)  Export:  BibTeX | EndNote (RIS)       Abstract  By microwave plasma enhanced chemical vapor deposition we prepared highly (002) oriented AIN nanometer thin film on Si(111) substrate. The effect on sudece morphology. film structure and deposition rate at various deposition conditions had been researched Key words:  microwave plasma      chemical vapor deposition      AIN film      growth mechanism      Received:  25 August 1998      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y1998/V12/I4/369 1W.Zhang ,Y.Someno,M.Sasaki T Hirai J.Grystal GrowtL 130 305(1993) 2S Xie, X.Liu, G Y.Meng Chem J Chinese Univ 17, 838(199) 3G Y Meng N Azema, B Cros,J.Durand L.Cot,J Crystal Growth, 129, 610(1993) 4 F.Hasegawa,T.Takahashi, K Kubo, Y Nannichi; Japan J. Appl Phys. 26 1555(1987)% [1] YANG Wenjing, LI Guangyu, WANG Jian, DING Hua, ZHANG Ning, ZHANG Yanling, HOU Hongliang, LI Zhiqiang. Morphology Evolution of Cavity and Energy Dissipation during Superplastic Deformation of 7B04 Al-alloy[J]. 材料研究学报, 2022, 36(9): 667-678. [2] SHAO Siwu, ZHENG Yuting, AN Kang, HUANG Yabo, CHEN Liangxian, LIU Jinlong, WEI Junjun, LI Chengming. Progress on Application of Bias Technology for Preparation of Diamond Films[J]. 材料研究学报, 2022, 36(3): 161-174. [3] LIU Zhufeng, HUANG Yaodong, YANG Xiao, HE Yuanjing, LI Zhaoqing, YAN Chunze. Preparation of Graphene/Ni-Cu Alloy Composite on Ni-Cu Alloy Template Made by Selective Laser Melting[J]. 材料研究学报, 2021, 35(1): 1-6. [4] ZHEN Longyun, PENG Peng, QIU Chenggong, ZHENG Beirong, ARMAOU Antonios, ZHONG Rong. Effect of Pre-deposited Al Layer on Growth of AlN Buffer Layer and GaN Film on Si Substrate by Metal-organic Chemical Vapor Deposition[J]. 材料研究学报, 2020, 34(10): 744-752. [5] Yibao WANG,Nan HUANG,Lusheng LIU,Ziyao YUAN,Peng LI,Wenxue ZHANG,Xin JIANG. Preparation and Cutting Performance of Diamond Coated Hard Alloy Cutting Tools for 7075 Aviation Al-alloy[J]. 材料研究学报, 2019, 33(1): 15-26. [6] Jun ZHANG,Lei ZHANG,Guodong LI,Xiang XIONG. Micro-morphology and Preferential Growth of ZrB2 Coating Prepared by Chemical Vapor Deposition[J]. 材料研究学报, 2017, 31(3): 168-174. [7] Dongze LV,Zhaoke CHEN,Xiang XIONG,Yalei WANG,Wei SUN,Zehao LI. Microstructure and Tribological Property of C-TaC Coatings on Graphite Prepared by Chemical Vapor Deposition[J]. 材料研究学报, 2016, 30(9): 690-696. [8] Zengming ZHANG,Jing WANG,Yutian DING,Yong HU,Xingji SHANG. Growth Mechanism of One-dimensional Rutile TiO2 Nanorods Array and Its Application for Dye-Sensitized Solar Cells[J]. 材料研究学报, 2014, 28(6): 469-475. [9] WANG Zhi WANG Xu. Synthesis of Carbon Nanotube Macroscopic Structures with Different Morphologies by Changing Substrates[J]. 材料研究学报, 2011, 25(4): 444-448. [10] WANG Yanping WANG Bing XIONG Ying ZHOU Liang. Preparation and Property of Nanocrystalline Diamond Film oped with N[J]. 材料研究学报, 2011, 25(2): 147-150. [11] KANG Zhixin SANG Jing LIU Yinghui WANG Fen LONG Yan LI Yuanyuan. Polymer Plating on Surface of Magnesium Alloy and Functional Characteristics of Nano Film[J]. 材料研究学报, 2010, 24(4): 337-342. [12] LIU Xinli WANG Shiliang ZHANG Quan DENG Yida HE Yuehu. Vapor Phase Synthesis and Optic Properties of MoO2 Micro/nanosheet[J]. 材料研究学报, 2010, 24(1): 17-24. [13] WANG Yiqian LIANG Wenshuang ROSS Guy. Microstructure and optical properties of Si nanocrystals embedded in SiO2 film[J]. 材料研究学报, 2009, 23(4): 352-356. [14] ;. The Analysis and Growth Mechanism of Core/Shell-type Ni/MnO Nanoparticls[J]. 材料研究学报, 2008, 22(3): 241-245. [15] WANG Hao;ZHU Hesun;SHEN Mingrong;NING Zhaoyuan(Beijing Institute of Technology) (Suzhou University). REVIEW ON THE NUCLEATION MECHANISM OF DIAMOND FILMS BY CHEMICAL VAPOR DEPOSITION[J]. 材料研究学报, 1998, 12(6): 570-574. No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed