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THE PROPERTIES OF Al_2O_3 HUMIDITY-SENSING THIN FILM PREPARED BY SOL-GEL METHOD |
CHEN Guangwen;YIN Jinghua;XUE Zhanlin;GUI Tailong(Harbin University of Sciencie and Technology) |
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Cite this article:
CHEN Guangwen;YIN Jinghua;XUE Zhanlin;GUI Tailong(Harbin University of Sciencie and Technology). THE PROPERTIES OF Al_2O_3 HUMIDITY-SENSING THIN FILM PREPARED BY SOL-GEL METHOD. Chin J Mater Res, 1995, 9(3): 255-258.
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Abstract Using sol-gel method. Al2O3 thin film have ben prepared on Al wafer with electrophoretic technique. The principal parts of the films are non-crystalline solid.and there are a little small crystallites in the films.The amount of crystallites increases with
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Received: 25 June 1995
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1HsiehHP.BhaveRR,FlemingHL.MembraneScience.1988:39:2212HelmutDislich.JNon-Cryst.1986:80:1153刘克俭,申海涛.电子元件与材料,1991:10(6):124卢朝靖,王世敏,赵建洪等.无机材料学报,1993:8(4):4665李彬.仪表材料,1990;21(5):290 |
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