Cite this article:
. . Chin J Mater Res, 1999, 13(6): 581-586.
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Received: 01 January 1900
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1 E.Kayl P.Parmigiani, W.Parrish, J.Vac.Sci.Technol.A, 6, 3094(198) 2 D.Dobrec, Thin Solid Films, 92, 41(1982) 3 M.Satou, K.Fujii, M.Kiuchi, F.Fujimoto, Nucl.Instrum.Methods B, 39, 166(1989) 4 Y.Andoh, K.Oguto, H.Yamaki, S.Sakai, Nucl.Instrum.Methods B, 39, 158(1989) 5 W.Ensinger, Surf.Coat.Technol., 65, 90(1994) 6 F.A.Smidt, Inter.Mater.Rev., 35, 61(1990) 7 Feng Zhang, Zhihong Zheng, Xinzhao Ding, Xianghuai Liu, J. VaC. Set. Technol.A, 15, 1829(1997) 8 R.M.Bradley, J.M.E.Harper, D.A.Sndth, J.Appl.Phys., 6O, 416D(1986) 9 R.S.Robinson, S.M.ROssnagel, In IOn Beam Modification of Scarces, edited by O. Auciello, R. Keily (Amsterdam, Elsevier, 1984) 10 U.C.Oh, J.H.Je, J.Appl.Phys., 74, 1692(1993) 11 W.Ensinger, M.Kiuchi, M.Satou, Surf.Coat.Technol., 66, 313(1994) 12 J.F.Ziegler, J.B.Biesack, U.Littmaxk, The stopping and Range of Ions in Solids (Pergamon, Oxford, 1985)p |
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