PHASE STRUCTURE AND STABILITY OF ZIRCONIA THIN FILMS

Chin J Mater Res

1993, Vol. 7

Issue (3): 234-239 DOI:

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PHASE STRUCTURE AND STABILITY OF ZIRCONIA THIN FILMS

WANG Yinghua LI Xiaoping (Tsinghua University)

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WANG Yinghua LI Xiaoping (Tsinghua University). PHASE STRUCTURE AND STABILITY OF ZIRCONIA THIN FILMS. Chin J Mater Res, 1993, 7(3): 234-239.

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Abstract Zirconia thin films were deposited by r.f.magnetron reactive sputtering methodwith the pure metal Zr,compound Y-ZrO_2 and Mg-ZrO_2 targets.The phase structures of thethree series films were investigated,and the effect of annealing and stressing were studi

Key words: zirconia films phase structure thin films

Received: 25 June 1993

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