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Chin J Mater Res  1996, Vol. 10 Issue (2): 187-190    DOI:
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INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE
TAO Kun;HE Xiangjun;JIANG Hai; FAN Yudian; LI Hengde(Tsinghua University)Correspondent: (Department of Materials Science and Engineering; Tsinghua University; Beijing 100084)
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TAO Kun;HE Xiangjun;JIANG Hai; FAN Yudian; LI Hengde(Tsinghua University)Correspondent: (Department of Materials Science and Engineering; Tsinghua University; Beijing 100084). INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE. Chin J Mater Res, 1996, 10(2): 187-190.

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Abstract  Molybdenum film and Fe16N2 thin film were deposited on Al2O3 (0001) and GaAs (001)substrate respectively by ion-beam assisted deposition (IBAD). The microstructure of the interface between the films and substrates were studied on atomic scale by using the
Key words:  ion-beam assisted deposition (IBAD);interface;microstructure     
Received:  25 April 1996     
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1李斗星,平德海,宁小光,叶恒强金属学报1992,A28(7):2832RuhleM,EvansAG,AshbyMF,HirthJPMetal-CeramicInterface.NewYork:PergamonPress,1990:1843DirksAG,WoltersRAM,VeirmanAEMDe.ThinSolidFilms,1992,208:1814HoffmanRA.LinJC.ThinSolidFilms,1991,206:2305SmidtFA.InternationalMaterialsReviews,1990,35(2):616杨杰,王晨,陶琨,范工殿真空科学与技术学报,1993,13(5):352
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