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INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE |
TAO Kun;HE Xiangjun;JIANG Hai; FAN Yudian; LI Hengde(Tsinghua University)Correspondent: (Department of Materials Science and Engineering; Tsinghua University; Beijing 100084) |
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Cite this article:
TAO Kun;HE Xiangjun;JIANG Hai; FAN Yudian; LI Hengde(Tsinghua University)Correspondent: (Department of Materials Science and Engineering; Tsinghua University; Beijing 100084). INVESTIGATION ON MICROSTRUCTURE OF THE INTERFACE BETWEEN IBAD THIN FILMS AND SUBSTRATE. Chin J Mater Res, 1996, 10(2): 187-190.
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Abstract Molybdenum film and Fe16N2 thin film were deposited on Al2O3 (0001) and GaAs (001)substrate respectively by ion-beam assisted deposition (IBAD). The microstructure of the interface between the films and substrates were studied on atomic scale by using the
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Received: 25 April 1996
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1李斗星,平德海,宁小光,叶恒强金属学报1992,A28(7):2832RuhleM,EvansAG,AshbyMF,HirthJPMetal-CeramicInterface.NewYork:PergamonPress,1990:1843DirksAG,WoltersRAM,VeirmanAEMDe.ThinSolidFilms,1992,208:1814HoffmanRA.LinJC.ThinSolidFilms,1991,206:2305SmidtFA.InternationalMaterialsReviews,1990,35(2):616杨杰,王晨,陶琨,范工殿真空科学与技术学报,1993,13(5):352 |
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