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Chin J Mater Res  1996, Vol. 10 Issue (2): 191-194    DOI:
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SYNTHESIS AND PROPERTIES OF SUPER-HARD TiB_2 FILM
WANG Xi(Shanghai Instituteof Metallurgy.Chinese Academy of Sciences)P.J.Martin(CSIRO Division of Applied Physics)Correspondent: (Shanghai Institute of Metallurgy;Chinese Academy of Sciences; Shanghai 200050)
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WANG Xi(Shanghai Instituteof Metallurgy.Chinese Academy of Sciences)P.J.Martin(CSIRO Division of Applied Physics)Correspondent: (Shanghai Institute of Metallurgy;Chinese Academy of Sciences; Shanghai 200050). SYNTHESIS AND PROPERTIES OF SUPER-HARD TiB_2 FILM. Chin J Mater Res, 1996, 10(2): 191-194.

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Abstract  Hard TiB2 films have been synthesized by ion beam sputtering. Observation by AFM indicated that the surface of the prepared TiB2 films is very smooth. AES, XRD and XPS analysis showed that the B: Ti ratio in the films is 1.8, the formed films are pricipal
Key words:  ion beam;film;TiB_2     
Received:  25 April 1996     
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