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| A NEW FABRICATION METHOD OF HIGH MELTING POINT METAL COATING |
| TANG Bin; HE Jiawen; WANG Congzen; XU Zhong (Xi'an Jiaotong University) (Taiyuan Polytechnic University) |
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Cite this article:
TANG Bin; HE Jiawen; WANG Congzen; XU Zhong (Xi'an Jiaotong University) (Taiyuan Polytechnic University). A NEW FABRICATION METHOD OF HIGH MELTING POINT METAL COATING. Chin J Mater Res, 1997, 11(2): 203-206.
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Abstract A new multiple hollow cathode sputtering target, which has a simple structure and a high sputtering rate,was put forward. The sputtering rate can be controlled by changing target voltage, pressure and H. D-1. The result shows that this method has a high d
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Received: 25 April 1997
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1.唐宾,王从曾,苏永安,徐重.中国专利 891037438. 1989年 8月
2.王从曾,唐宾,徐重.金属热处理学报.12(3),43(1991 |
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