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PREMRAfION OF MOSAIC THIN FILM WITH GaAs MICROCRYSTALITES EMBEDDED IN SiO_2 MATRIX |
SHI Wangzhou;LIN Kuixun;LIN Xuanying(Institute of Functional Materials ;Shantou University ;515063) |
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Cite this article:
SHI Wangzhou;LIN Kuixun;LIN Xuanying(Institute of Functional Materials ;Shantou University ;515063). PREMRAfION OF MOSAIC THIN FILM WITH GaAs MICROCRYSTALITES EMBEDDED IN SiO_2 MATRIX. Chin J Mater Res, 1998, 12(5): 555-557.
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Abstract Semiconductor GaAs microcrystallites were successfully embedded in SiO2 thin films by RF magnetron co-sputtering technique. Structures of the thin films were characterized by transmisson electron microscopy X-ray diffraction and X-ray photoelectron micros
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Received: 25 October 1998
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