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THE CRYSTALLINE PROPERTY CHANGES OF a-WOx FILMS CAUSED BY ELECTROCHROMIC REACTION PROCESS |
WANG Xiaoguang; JIANG Yueshan; YANGNaiheng (Northeastern University)YUAN Lei; PANG Shiin(Beiing Laboratory of Vacuum Physics. The Chinese Academy of Sciences) |
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Cite this article:
WANG Xiaoguang; JIANG Yueshan; YANGNaiheng (Northeastern University)YUAN Lei; PANG Shiin(Beiing Laboratory of Vacuum Physics. The Chinese Academy of Sciences). THE CRYSTALLINE PROPERTY CHANGES OF a-WOx FILMS CAUSED BY ELECTROCHROMIC REACTION PROCESS. Chin J Mater Res, 1997, 11(5): 547-549.
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Abstract The crystalline property of reaction sputtering deposition WOx films, caused by electrochromic reaction, are studied with XRD and STM techniques. The XRD results indict that electrochromic reaction makes the as-deposited a-WOx film amorphous property redu
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Received: 25 October 1997
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