CARBON NITRIDE FILMS DEPOSITED BY REACTIVE IONIZED CLUSTER BEAM METHOD

Chin J Mater Res

1996, Vol. 10

Issue (5): 525-528 DOI:

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CARBON NITRIDE FILMS DEPOSITED BY REACTIVE IONIZED CLUSTER BEAM METHOD

XIE Junqing;FENG Jiayou; ZHENG Yi(Tsinghua University).

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XIE Junqing;FENG Jiayou; ZHENG Yi(Tsinghua University).. CARBON NITRIDE FILMS DEPOSITED BY REACTIVE IONIZED CLUSTER BEAM METHOD. Chin J Mater Res, 1996, 10(5): 525-528.

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Abstract Carbon nitride thin films have been prepared by reactive ionized cluster beam (RICB)technique on Si(100)and NaCl(100) substrates, using low molecular weight polyethylene as evaporation material and ammonia as reactive gas. As revealed by transmission elec

Key words: ionized cluster beam; carbon nitride films

Received: 25 October 1996

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https://www.cjmr.org/EN/ OR https://www.cjmr.org/EN/Y1996/V10/I5/525

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