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| EFFECTS OF ELECTRODE NEGATIVE BIAS ON THE PROPERTIES OF DLC FILM |
| GUO Lijun; XU Niankan; LIU Zhengtang ;ZHANG Guifong; ZHENG Xiulin(Northwestern POlytechnical University) |
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Cite this article:
GUO Lijun; XU Niankan; LIU Zhengtang ;ZHANG Guifong; ZHENG Xiulin(Northwestern POlytechnical University). EFFECTS OF ELECTRODE NEGATIVE BIAS ON THE PROPERTIES OF DLC FILM. Chin J Mater Res, 1994, 8(1): 67-70.
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Abstract Diamond-like carbon (DLC) films on the germanium disks have been prepared from C2H2 and Ar futures by RF-DC Plasma chemical vaPOur dePOsition. It was observed that the film properties vary with variations of different deposition parameters, among which t
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Received: 25 February 1994
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| IKoidlp,WildCh,DischerBetal,MaterialsScienceForum．1989;52:412毛友德等合肥工业大学学报,1986;8(3):403郭力军等．首届中国功能材料及其应用学术会议论文集．桂林,1992:5664KuntEnke．AppliedOptics,1985;24(4):5085BayneMA,KurokawaZ,OkorieNUetalThinSolidFilms,1983;107:2016闻立时．材料的表面与界面,北京:清华大学出版社,1990:1117郭力军等．西北工业大学学报,1992;10(4):565 |
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