Chin J Mater Res  1994, Vol. 8 Issue (1): 61-66    DOI:

Current Issue | Archive | Adv Search |

SYNTHESIS OF GRADIENT FILM BY ION BEAM ENHANCED DEPOSITION BEAM ENHANCED DEPOSITION

LIU Xianghuai; YANG Genqing; WANG Xi; ZHENG Zhihong; HUANG Wei; ZOU Shichang(Shanghai Institute of Metallurgy; Chinese Academy of Sciences)

LIU Xianghuai; YANG Genqing; WANG Xi; ZHENG Zhihong; HUANG Wei; ZOU Shichang(Shanghai Institute of Metallurgy; Chinese Academy of Sciences). SYNTHESIS OF GRADIENT FILM BY ION BEAM ENHANCED DEPOSITION BEAM ENHANCED DEPOSITION. Chin J Mater Res, 1994, 8(1): 61-66.

Abstract References Related Articles Recommended Metrics Download:  PDF(505KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Gradient thin films are useful for space and air crafts and for industries working in high temperature. teChnologies. The techniques for the preparation of these films were developed quickly during the last years. Ion Beam Enhanced Depostition (IBED) is Key words:  Ion Beam Enhanced Deposition (IBED); silicon nitride; gradient film      Received:  25 February 1994      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y1994/V8/I1/61 1LiuXianghuai,XueBin,ZhengZhihongetalNuclInstrandMethsinPhysRes,1989;B39:1852YuYuehui,LiuXianghuai,FangZiweietal．AppliedSurfaceScience,1989;40:1453柳襄怀,俞跃辉等．薄膜科学与技术,1989;2(3):154TaniguchiS,LiuXianghuaietal,MaterialsScienceandEngineering1989;A121:5195LiuXianghuai,TaniguchiSetal．SurfaceandCoatingsTechnology,1991;46:2276LiuXianghuai,WolfGKetal．NucllnstrandMethsinPhysRes,1991;B59//60:8517TaniguchiS,LiuXiangbuaietal．ISIJInternational,1993;33(8):869: No related articles found! No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed