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| 偏压对阴极电弧离子镀AlN薄膜的影响 |
| 黄美东1;2; 董闯1;宫骏2;卢春燕2;孙超2;黄荣芳2; 闻立时2 |
| 1 大连理工大学三束材料改性国家重点联合实验室 2 中国科学院金属研究所 |
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引用本文:
黄美东; 董闯; 宫骏; 卢春燕; 孙超; 黄荣芳; 闻立时 . 偏压对阴极电弧离子镀AlN薄膜的影响[J]. 材料研究学报, 2001, 15(6): 675-680.
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