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材料研究学报  2002, Vol. 16 Issue (2): 113-120    
  论文 本期目录 | 过刊浏览 |
透明导电膜ZnO:Al的组织结构与特性
孙超; 陈猛; 裴志亮; 曹鸿涛; 黄荣芳; 闻立时
中国科学院金属研究所
引用本文:

孙超; 陈猛; 裴志亮; 曹鸿涛; 黄荣芳; 闻立时 . 透明导电膜ZnO:Al的组织结构与特性[J]. 材料研究学报, 2002, 16(2): 113-120.

全文: PDF(980 KB)  
摘要: ZnO:Al(ZAO)是一种简并半导体氧化物薄膜材料,具有高的载流子浓度和大的光学禁带宽度,因而具有优异的电学和光学性能,极具应用价值。对于其能级高度简并的ZAO半导体薄膜材料,在较低的温度下,离化杂质散射占主导地位;在较高的温度下,晶格振动散射将成为主要的散射机制;晶界散射仅当晶粒尺寸较小(与电子的平均自由程相当)时才起作用。本文介绍了ZAO薄膜的制备方法、晶体结构特性、电学和光学性能以及载流子的散射机制。
关键词 透明导电氧化物简并半导体ZAO薄膜    
Key words
收稿日期: 1900-01-01     
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