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材料研究学报  1997, Vol. 11 Issue (4): 337-345    
  研究论文 本期目录 | 过刊浏览 |
分子束外延材料表面椭圆缺陷的研究进展
王红梅;孔梅影
中国科学院半导体研究所;中国科学院半导体研究所
PROGRESS IN SURFACE OVAL DEFECTS STUDY ON MOLECULAR BEAM EPITAXY GROWN MATERIALS
WANG Hongmei;KONG Meiying (Institute of Semiconductors; Chinese Academy of Sciences)
引用本文:

王红梅;孔梅影. 分子束外延材料表面椭圆缺陷的研究进展[J]. 材料研究学报, 1997, 11(4): 337-345.
, . PROGRESS IN SURFACE OVAL DEFECTS STUDY ON MOLECULAR BEAM EPITAXY GROWN MATERIALS[J]. Chin J Mater Res, 1997, 11(4): 337-345.

全文: PDF(1513 KB)  
摘要: 综述了分子束外延材料的表面缺陷──主要是椭圆缺陷──的种类、特征、起因、消除方法等,重点介绍了可能导致椭圆缺陷产生的重要因素,如Ga小液滴、Ga的氧化物及衬底沾污等,并提出相应的改进措施。
关键词 分子束外延椭圆缺陷Ga液滴Ga氧化物衬底沾污    
Abstract:This paper reviews the study on the classification, characteristics, origination and eliminating methods of surface oval defects on Molecular Epitaxy Beam (MBE) grown materials. Several possible origins such as gallium droplets, gallium oxide and substrat
Key wordsMBE oval defects Ga droplets Ga oxide substrate contanimation
收稿日期: 1997-08-25     
1C.E.C.Wood,L.Rathbun,H.Ohno,D.DeSimone,J.Cryst.Growth.51(2),299(1981)
2. Y.G.Chai, R.Chow, Appl.Phys.Lett 38(10),796(1981)
3 .S.Izumi,N.Hayafuji,T.Sonoda,S.Takamiya,S.Mitsui,J.Cryst.Growth.150(1),7(1995)
4.K.Nanbu,J.Saito,T.Ishikawa,K.Kondo,A.Shibatomi,J.Electrochem.Soc.133(3),601(1986)
5.K.Fujwara,K.Kanamoto,YN.Ohta,Y.Tokuda,T.Nakayama,J.Cryst.Growth.80(1),104(1987)
6 Y.G.Chai,Y.C.Pao,T.Hierl,Appl.Phys.Lett.47(12),1327(1985)
7 .Y.H.Wang, W.C.Liu, C.Y.Chang, SrtLiao, J.Vac Sci.Technol B4(1),30(1986)
8. J.C.M.Hwang,T.M.Brennan,A.Y.Cho,J.Electrochem.Soc 130(2),493(1983)
9. W.C.Liu,D.F.Guo,C.Y.Sun,W-S.Lour,J.Cryst.Growth.114(4),700(1991)
10. N.Chand, S.N.G.Chu, J.Cryst.Growth 104(2),485(1990)
11.M.Shinohara,T.Ito,K.Wada,Y.Imamura、Jpn.J.Appl.Phys.23(6),L371(1984)
12.Y.Nishikawa,K.Kanamoto,Y.Tokuda,K.Fujiwara,T.Nakayma,Jpn.J. Appl.Phys.25(6),908(1986)
13.T.Nakamura,K.Nanbu,T.Ishikawa,K.Kondo,J.Appl.Phys.64(4),2164(1988)
14 . M.A.Cotta, R.A.Hamm, S.N.G.Chu, L.R.Harriott, H.Temkin, Appl Phys. Lett 66(18),2358(1995)
15.A Salokatve,J.Varrio,J.Lammasniemi,H.Asonen,M.Pessa,Appl.Phys.Lett.51(17),1340(1987)
16.Y.C.Chow, C.T.Lee, Jpn.J.Appl.Phys 26(5),774(1987)
17.M.Shinohara, T.Ito, Y.Imamura,J.Appl.Phys 58(9),3449(1985)
18.M.Shinohara,T.Ito,J.Appl.Phys.65(11),4260(1989)
19.H.Kawada,S.Shirayone,K.Takahashi ,J.Cryst.Growth.128(1-4),550(1993)
20.Y.H.Wang ,W.C.Liu,S.A.Liao,K.Y.Cheng ,C.Y.Chang,Jan.J.Appl.Phys.24(5),(1985)628
21. Y.Suzuki, M.Seki, Y.Horikoshi, H.Okamoto, Jpn.J.Appl.Phys 23(2),164(1984)
22.H.Saito,J.O.Borland,H.Asahi,H.Nagai,K、Nawata,J.Cryst.Growth.64(3),521(1983)
23. H.Kakibayashi, F.Nagata, Y.Katayama , Y.Shirski, Jpn.J.Appl.Phys. 23(11),L846(1984)
24.M.Bafleur, A.Munoz-yague, Rocher, J.Cryst.Growth. 59(3),531(1982)
25. T.Ito, M.Shinohara, Y.Imamura, Jpn.J.Appl.Phys, 23(8),L524(1984)
26.S.L.Weng,Appl.Phys.Lett 49(6),345(1986)
27.C.T.Lee, Y.C.Chow, J.Cryst .Growth .91(1/ 2),169(1988)
28.P.E.Brunerneier,J.Vac.Sci.Technol. B9(5),2554(1991)
29.N.Chand,J.Vac.Sci.Technol B8(2),160(1990)
30.J.N.Miller, J.Vac.Sci.Technol. B10(2),803(1992)
31.K.Takahashi,H.Kawada,S.Ueda,M.Furuse,S.Shiayone,J.Vac.Sci.Technol.A9(3),854(1991)
32.S.Matteson, H.D.Shih, Appl.Phys.Lett 48(1),47(1986)
33. A.C.Papadopoulo, F.Alexandre, J.F.Bresse, Appl.Phys.Lett. 52(33),224(1988)
34.J.E.M.Haverkort, M.P.Schuwer, M.R.Leys,J.H.Wolter, Semicond.Sci.Technol 7(1),A59(1992)
35.J.Sapriel,J.Chavignon, F.Alexandre, Appl.Phys.Lett. 52(23),1970(1988)
36.W.T.Tsang,Appl.Phys.Lett. 46(11),1086(1985)
37.R.A.Stall,J.Zilko,V.swaminathan,N.Schumaker,J.Vac .Sci.Techonol.B3(2),524(1985)
38.T.Sonoda,M.Ito,K.Segawa,S.Takamiya,S.Mitsui,Jan.J.Appl.Phys.27(3),337(1988)
39.D.G.Schlom, W.S.Lee, T.Ma,J.S.Harris,Jr,J.Vac.Sci.Technol B7(2),296(1989)
40.N.Watanabe,T.Fukunaga,K.L.I.Kobayashi,H.Nakashima,Jpn.JAppl.Phys.24(7),L498(1985)
41.M.Metze,A.R.Calawa,J.G.Mavroides,J .Vac.Sci.Technol.B1(2),166(1983)
42.K.Akimoto,M.Dohsen,M.Arai,N.Watanabe,J.Cryst.Growth.73(1),117(1985)
43.P.D.Kirchner,J.M.Woodwall,J.L.Freeout ,G.D.Pettit, Appl,Phys Lett.38(6),427,(1981)
44. S.L.Weng,C.Webb,Y.G.Chai,S.G.Bandy,Appl.Phys.Lett.47(4),391(1985)
45.J.Massies ,J.P.Contour, J.Appl.Phys.58(2),806(1985)
46.H.Fronius,A.Fischer,K.Ploog,Jpn.J.Appl.Phys.25(2),L137(1986)
47.H.Fronius,A.Fischer,K.Ploog,J.Cryst.Growth.81(1-4),169(1987)
48. C.Y.Li,D.H.Zhang,J.Cryst.Cryst.Growth.165(1),15(1996)
49. S.Takagishi,H.Yao,H.Mori,J.Cryst.Growth.129(3/4),443(1993)
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