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Chin J Mater Res  1998, Vol. 12 Issue (3): 233-238    DOI:
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THE PROGRESS OF SiC SINGLE CRYSTAL GROWTH AND ITS DEVICES
WANG Yinshu; LI Jinmin; LIN Lanying (Institute of Semiconductors; The Chincse Academy of Sciences; Beijing 100083)
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WANG Yinshu; LI Jinmin; LIN Lanying (Institute of Semiconductors; The Chincse Academy of Sciences; Beijing 100083). THE PROGRESS OF SiC SINGLE CRYSTAL GROWTH AND ITS DEVICES. Chin J Mater Res, 1998, 12(3): 233-238.

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Abstract  SiC is a material with large band gap, high thermal conductivity, high electron saturation velocity, high breakdown voltage and low dielectric constant. Its promising properties make it a attractive material for high-frequency, high-power, high-temperatur
Key words:  SiC single crystal growth      epilayer growth      SiC devices     
Received:  25 June 1998     
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