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THE INVESTIGATIONS ON NANA-SCALE MULTILAYERS OF CN_x/NbN SYNTHESIZED BY IBAD |
WANG Jing; HE Jianli;LI Wenzhi;LI Hengde(Depertment of Material Science and Technolopy; Tsinghua Univ.; Beijing 100084) |
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Cite this article:
WANG Jing; HE Jianli;LI Wenzhi;LI Hengde(Depertment of Material Science and Technolopy; Tsinghua Univ.; Beijing 100084). THE INVESTIGATIONS ON NANA-SCALE MULTILAYERS OF CN_x/NbN SYNTHESIZED BY IBAD. Chin J Mater Res, 1998, 12(5): 543-545.
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Abstract Nano-scale multilayers of CNx/NbN have been prepared by ion beam sputtering deposition. The effects of such deposition parameters as substrate temperature, bombarding energy individual layer thickness, etc, were studied. TEM and X-ray analysis confirmed t
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Received: 25 October 1998
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