THE INITIAL STAGE OF ION BEAM DEPOSITING Ti AND Ni FILM GROWTH
YANG Chunsheng;ZHOU Di;QI Zhenzhong;ZHANG Shoubo;CAI Bingchu(Shanghai Jiaotong University)
Cite this article:
YANG Chunsheng;ZHOU Di;QI Zhenzhong;ZHANG Shoubo;CAI Bingchu(Shanghai Jiaotong University). THE INITIAL STAGE OF ION BEAM DEPOSITING Ti AND Ni FILM GROWTH. Chin J Mater Res, 1996, 10(5): 494-496.
Abstract The initial stage of ion beam sputtered Ni and Ti film has been investigated in situ using AES .The results show that the film growth model of Ti and Ni films sputtered on Si single crystal (100) surface are FM model i.e layer by layer growth model. The f
