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Chin J Mater Res  1995, Vol. 9 Issue (6): 535-538    DOI:
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THE PROCESSING EFFECTS ON STRUCTURE AND PROPERTIES OF SOL-GEL DERIVED PLZT FERROELECTRIC THIN FILMS
YAN Peiyu LI Longtu ZHANG Xiaowen(Tsinghua University)(Correspondent: YAN Peiyu;Dept.of Materials Science and Engineering;Tsinghua University;Beijing 100084)
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YAN Peiyu LI Longtu ZHANG Xiaowen(Tsinghua University)(Correspondent: YAN Peiyu;Dept.of Materials Science and Engineering;Tsinghua University;Beijing 100084). THE PROCESSING EFFECTS ON STRUCTURE AND PROPERTIES OF SOL-GEL DERIVED PLZT FERROELECTRIC THIN FILMS. Chin J Mater Res, 1995, 9(6): 535-538.

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Abstract  PLZT thin films with good ferroelectric properties were fabricated using the sol-gel method on platinized silicon.The processing parameters affecting the microstructure and electric properties of thin films were investigated. Suitable concentration and hy
Key words:  PLZT erroelectric thin film sol-gel     
Received:  25 December 1995     
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1HaertlingGH,Ferroelectrics,1992;131:12KwokCK,DesuSB,JMaterRes,1993;8(2):3393DormansGJM,deKeuserM,vanVeidhovenPJ.MatResSocSympProc,1992,243:203,
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