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| ON THE COMPOSITION, PHASE STRUCTURE AND OXIDIZED PROPERTY OF AIN FILMS |
| XIA Lifang; WANG Zuochen; SUN Yue; MA Xinxin; CHEN Shifang(Harbin Institute of Technology) |
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Cite this article:
XIA Lifang; WANG Zuochen; SUN Yue; MA Xinxin; CHEN Shifang(Harbin Institute of Technology). ON THE COMPOSITION, PHASE STRUCTURE AND OXIDIZED PROPERTY OF AIN FILMS. Chin J Mater Res, 1995, 9(4): 361-363.
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Abstract The composition, phase structure and oxidized property of AIN films heated in atmosphere at different temperature have been investigated with X-ray photoelectron spectroscopy(XPS) in this paper.The results showed that about 60nm thick of Al2O3 film on the
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Received: 25 August 1995
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| 1Perkin—ElmerCorporation,HandbookofX—rayPhotoelectronSpectroscopy,1978:102徐祖耀,金属材料热力学．北京:科学出版社,1983:2913吉林工业大学,物理化学．北京:机械工业出版社,1980:388—343 |
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