Chin J Mater Res  1995, Vol. 9 Issue (3): 245-249    DOI:

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THE INFLUENCES OF TEMPERATURE FIELD ON LARGE AREA DIAMOND GROWTH OF DIAMOND FILM BY HFCVD

CHAN Yan; HUANG Rongfang; WEN Lishi; SHI Chuangxu(Institute of Metal Research; Chinese Academy of Sciences)

CHAN Yan; HUANG Rongfang; WEN Lishi; SHI Chuangxu(Institute of Metal Research; Chinese Academy of Sciences). THE INFLUENCES OF TEMPERATURE FIELD ON LARGE AREA DIAMOND GROWTH OF DIAMOND FILM BY HFCVD. Chin J Mater Res, 1995, 9(3): 245-249.

Abstract References Related Articles Recommended Metrics Download:  PDF(1294KB)  Export:  BibTeX | EndNote (RIS)       Abstract  The large area temperature field was formed through large area planary arrangment of parallel W filament arrangment. and the temperature distribution of temperature field was measured. The results have shown that an uniform temperature region of 70×70mmwi Key words:  HFCVD. diamond film. temperature field      Received:  25 June 1995      Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors URL:  https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y1995/V9/I3/245 1MatsumotoM．SatoY．KamoM．SetakaN．JApplPhys．1982:21:1832KamoM．SatoY．MatsumotoS．SetakaN．JCrystGrowth．1983:62(3):6423MatsumotoS．JMaterSciLett．1985:4:6004LandstrassMI．RaviKV．ApplPhysLett．1989:55:13915FrenklachM,SpearKE．JMaterRes．1988:3:1336ChenI．JApplPhys,1988:64:37427TsudaM．NakajimaM．Oikawa．JAmChemSoc．1986:108:57808PiekarcaykW．YarbroughWA．JCrustGrowth,1991:108:5839TheComputerSimulationofTheRaditionFieldinHFCVD．Y．Cheneta．,tobepublished10TheInfluencingFactorsofTempratureFieldinHFCVD．Y．Chenetal．,tobepublished| No related articles found! No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed