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| SYNTHESIS AND CONDUCTING PROPERTIES OF YSZ THIN FILMS |
| YU Weijie; Tan Qi; PENG Dingkun; MENG Guangyao CAO Chuanbao;HU Jiankai; ZHANG Yuheng (University of Science and Technology of China) |
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Cite this article:
YU Weijie; Tan Qi; PENG Dingkun; MENG Guangyao CAO Chuanbao;HU Jiankai; ZHANG Yuheng (University of Science and Technology of China). SYNTHESIS AND CONDUCTING PROPERTIES OF YSZ THIN FILMS. Chin J Mater Res, 1994, 8(4): 337-342.
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Abstract The optical properties of YSZ thin films synthesized by microwave plasma CVD process have been examined. The transmittances in the range of 230-900nm wavelength are about 72%. The technique of ac impedance was used to measure the conductivity of YSZ films
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Received: 25 August 1994
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