SURFACE DAMAGE OF LiNbO_3 IMPLANTED BY Ti ION

Chin J Mater Res

1992, Vol. 6

Issue (6): 514-518 DOI:

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SURFACE DAMAGE OF LiNbO_3 IMPLANTED BY Ti ION

ZHOU Jianhua;YOU Boqiang;ZHANG Liangying;YAO Xi(Xi'an Jiaotong University)

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ZHOU Jianhua;YOU Boqiang;ZHANG Liangying;YAO Xi(Xi'an Jiaotong University). SURFACE DAMAGE OF LiNbO_3 IMPLANTED BY Ti ION. Chin J Mater Res, 1992, 6(6): 514-518.

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Abstract Damage and annealing effect of x,y and z cut LiNbO_3 implanted by 350keVhigh energy Ti(1.5×10~(17)/cm~2)were studied.The damage caused by ion implantation is re-moved by high temperatures annealing in dry oxygen atomsphere at different temperatures andtim

Key words: ion implantation surface damage lattice sites

Received: 25 December 1992

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https://www.cjmr.org/EN/ OR https://www.cjmr.org/EN/Y1992/V6/I6/514

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