DEPOSITION OF DIAMOND FILM ON Si_3N_4 AND SAILON CERAMICS

Chin J Mater Res

1992, Vol. 6

Issue (1): 56-59 DOI:

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DEPOSITION OF DIAMOND FILM ON Si_3N_4 AND SAILON CERAMICS

CHEN Yan;HUANG Rongfang;WEN Lishi;SHI Changxu(Institute of Metal Research;Acadamia Sinica)

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CHEN Yan;HUANG Rongfang;WEN Lishi;SHI Changxu(Institute of Metal Research;Acadamia Sinica). DEPOSITION OF DIAMOND FILM ON Si_3N_4 AND SAILON CERAMICS. Chin J Mater Res, 1992, 6(1): 56-59.

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Abstract In this paper,diamond film had been synthesized on Si_3N_4+SiC composite ce-ramics and sialon ceramics by HFCVD(hot filament chemical vapor deposition).The obtaindfilms were analysized by X-ray diffraction,Raman spectrometer,scanning electron microscopy,p

Key words: HFCVD diamond film thermal expand coeffcient

Received: 25 February 1992

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https://www.cjmr.org/EN/ OR https://www.cjmr.org/EN/Y1992/V6/I1/56

1 闻立时,黄荣芳.薄膜科学与技术,1990;3(3) :72
2 Matsumoto S,Soto Y.J Mat Sci,1982;7:3106
3 Setaka N.J Mater Res,1989;4:664
4 Kamo K,Sato Y,Matsumoto Set al.J Cryst growth,1983;62:642
5 Suzuku K,Sawabe A,Yasuda H et al.Appl Phy Lett,1987;50:728
6 Joffreau P O,Haubner R,Lux B et al.1988;12:186
7 Kumo M,Chawanya H,Tanaka T et al.Mat Sci and Engineering A 1988;105/106:535
8 Bichler R,Haubner R,Lux B.Proc 12th 1st.Please seminar,May 8-12,1989;C-15:427
9 Huang Rongfang,Chen Yan,Wen Lishi et al.C-MRS 1990
10 Diane S,Knight,William B.J Mat Res 1989;4(2) :385
11 Atsuhito,Sawabe et al.Thin Solid Film,1986;137:89
12 Williams B E,Glass J T.J Mater Res 1989;4(2) :373

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