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| SiC单晶的生长及其器件研制进展 |
| 王引书;李晋闽;林兰英 |
| 中国科学院半导体研究所;北京市;100083;中国科学院半导体研究所;中国科学院半导体研究所 |
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| THE PROGRESS OF SiC SINGLE CRYSTAL GROWTH AND ITS DEVICES |
| WANG Yinshu; LI Jinmin; LIN Lanying (Institute of Semiconductors; The Chincse Academy of Sciences; Beijing 100083) |
引用本文:
王引书;李晋闽;林兰英. SiC单晶的生长及其器件研制进展[J]. 材料研究学报, 1998, 12(3): 233-238.
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THE PROGRESS OF SiC SINGLE CRYSTAL GROWTH AND ITS DEVICES[J]. Chin J Mater Res, 1998, 12(3): 233-238.
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