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材料研究学报  2007, Vol. 21 Issue (4): 444-448    
  论文 本期目录 | 过刊浏览 |
液相外延法制备β-BBO薄膜
刘军芳  徐军  姚武
引用本文:

刘军芳; 徐军; 姚武 . 液相外延法制备β-BBO薄膜[J]. 材料研究学报, 2007, 21(4): 444-448.

全文: PDF(753 KB)  
摘要: 采用液相外延法在掺Sr2+的α-BBO(001)衬底上制备了β-BBO薄膜,研究了制备条件对薄膜质量的影响.结果表明:当生长温度为810 ℃时,转速为300 r/min生长的外延膜具有较高的结晶质量,且随着生长时间的延长,外延膜的结晶质量有所提高.β-BBO薄膜呈c轴高度择优取向,薄膜的双晶摇摆曲线半峰宽值FWHM仅为676.6″,表明β-BBO薄膜较好的结晶质量;在不具备相位匹配的条件下,β-BBO外延膜也能够实现二次谐波输出.
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收稿日期: 1900-01-01     
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