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材料研究学报  2007, Vol. 21 Issue (1): 31-36    
  论文 本期目录 | 过刊浏览 |
织构对CVD自支撑金刚石薄膜残余应变的影响
朱宏喜  毛卫民  冯惠平
引用本文:

朱宏喜; 毛卫民; 冯惠平 . 织构对CVD自支撑金刚石薄膜残余应变的影响[J]. 材料研究学报, 2007, 21(1): 31-36.

全文: PDF(504 KB)  
摘要: 计算了薄膜试样不同方向的弹性模量,研究了织构和甲烷浓度对CVD自支撑金刚石薄膜的宏观残余应变的影响.结果表明,织构使CVD金刚石薄膜的弹性模量和宏观残余应变呈现各向异性.甲烷浓度的升高导致织构组分密度水平变化,使薄膜的弹性模量增大,从而降低残余应变;另一方面,杂质浓度的升高增大宏观残余应变.改变薄膜沉积工艺参数可调整织构,从而调节薄膜的残余应力.
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收稿日期: 1900-01-01     
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