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材料研究学报  2006, Vol. 20 Issue (3): 255-258    
  论文 本期目录 | 过刊浏览 |
金刚石厚膜的晶界对耐磨性的影响
姜志刚  冯玉玲  纪红  郑涛  杨传经  李博  金曾孙
引用本文:

姜志刚; 冯玉玲; 纪红; 郑涛; 杨传经; 李博 ; 金曾孙 . 金刚石厚膜的晶界对耐磨性的影响[J]. 材料研究学报, 2006, 20(3): 255-258.

全文: PDF(870 KB)  
摘要: 用直流辉光等离子体化学气相沉积制备金刚石厚膜,用氢的微波等离子体对其抛光截面进行刻蚀,研究了晶界对金刚石厚膜耐磨性的影响.结果表明:在金刚石膜的生长过程中,随着甲烷流量的增加,金刚石膜的晶界从纵向排列为主过渡到网状结构,晶粒内部缺陷逐渐增加,杂质、空洞主要分布于晶界处.金刚石膜的磨耗比随着晶界密度、宽度、杂质含量及晶粒内部缺陷的增加而下降.晶界是杂质、空洞主要富集区,是影响金刚石厚膜耐磨性的主要因素.
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收稿日期: 1900-01-01     
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