材料研究学报  2005, Vol. 19 Issue (1): 64-71

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磁控溅射Ti合金薄膜结构特征及贮氢性能

马爱华;郑华;于洪波;刘实;王隆保

中国科学院金属研究所

The structure and hydrogen storage characteristic of magnetron sputtering Ti--base alloy films

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中国科学院金属研究所

马爱华; 郑华; 于洪波; 刘实; 王隆保 . 磁控溅射Ti合金薄膜结构特征及贮氢性能[J]. 材料研究学报, 2005, 19(1): 64-71.

摘要 参考文献 相关文章 Metrics 全文: PDF(1364 KB)   摘要: 采用磁控溅射方法制备了Ti膜及TiMo、TiMoYAl和TiZrYAl等三种合金膜. 合金膜中Mo、Zr和Al三种元素成份与靶材成分基本一致, 而Y元素则与靶材成分有较大的偏差. 在400℃吸氢工艺下, 四种膜材的吸氢动力学性能良好, 没有脱膜现象, 饱和吸氢量均可超过1.5(H/M). 膜材的吸氢PCT曲线表明, 含Mo合金膜材具有最高的吸氢平衡压, 外推出的室温下的数量级约为10$^{-4}$Pa. Abstract：The magnetron sputtering method was used to prepare Ti-base alloy films. The concentration of the alloy elements such as Mo, Zr and Al in the films is consistent with that in the targets, while the Y concentration has a large deviation from that in the targets. The hydrogen absorption dynamics of the four films at 673 K is fine and the TiZrYAl film has the best hydriding activity. The hydrogen storage capacities of all the four films exceed 1.5 (H/M). The hydrogen absorption P--C isotherms of the films were measured. The films alloying with Mo have the highest hydrogen absorption equilibrium pressure, which is determined as about 10$^{-4}$ Pa at ambient temperature. Key words： 收稿日期: 2004-04-15      服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 马爱华 郑华 于洪波 刘实 王隆保 44.8K 链接本文: https://www.cjmr.org/CN/Y2005/V19/I1/64 1 C.R.Brune, R.W.Kavanagh, Phys. Res. A, 343, 415(1994) 2 B.J.Hughey, Phys. Res. B, 95, 393(1995) 3 WANG Longbao, LV Manqi, Li Yiyi, Acta Metallurgica Sinica, 39(5), 449(2003)(王隆保,吕曼祺,李依依,金属学报,39(5),449(2003)) 4 L.C.Beavis, J. Less-Comm. Met., 27, 201(1972) 5 D.L.Smith, Thin Film Deposition (New York: McGraw-Hill Inc. Press, 1995) p.86 6 H.Kanzaki, J. Phys. Chem. Solids, 2(1), 24(1957) 7 Y.Y.Tse, D.Babonneau, Surf. Coat. Tech., 180, 470(2004) 8 P.E.Irving, C.J.Beevers, Metall. Trans., 2, 613(1971) 9 ZHENG Hua, LIU Shi, MA Aihua, WANG Longbao, Chinese Journal of Materials Research, 17(6), 590(2002)(郑华,刘实,马爱华,王隆保,材料研究学报,17(6),590(2002)) 10 A.SanMartin, F.D.Manchester, Bulletin of Alloy Phase Diagrams, 8(1), 30(1987) 11 Z.S.Wronski, Inter. Mater. Res., 46(1), 1(2001) 12 ZHAO Yue, ZHENG Hua, LIU Shi, WANG Longbao, Acta Metallurgica Sinica, 39(1), 89(2003)(赵越,郑华,刘实,王隆保,金属学报,39(1),89(2003))a No related articles found! Viewed Full text Abstract Cited   Shared      Discussed