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材料研究学报  1997, Vol. 11 Issue (2): 158-162    
  研究论文 本期目录 | 过刊浏览 |
含氧量对NiO_x薄膜光电特性的影响
傅竹西;林碧霞;韩宪泽;廖桂红
中国科技大学;中国科技大学;中国科技大学;中国科技大学
THE PHASE TRANSITION AND PHOTOELECTRONIC PROPERTIES OF NiO_x THIN FILMS
FU Zhuxi; LIN Bixia; HAN Xianzhe; LIAO Guihong (University of Science and Technology of China)
引用本文:

傅竹西;林碧霞;韩宪泽;廖桂红. 含氧量对NiO_x薄膜光电特性的影响[J]. 材料研究学报, 1997, 11(2): 158-162.
, , , . THE PHASE TRANSITION AND PHOTOELECTRONIC PROPERTIES OF NiO_x THIN FILMS[J]. Chin J Mater Res, 1997, 11(2): 158-162.

全文: PDF(407 KB)  
摘要: 采用直流溅射方法制备了厚度小于0.1μm的NiOx薄膜,研究薄膜的加热氧化及其光电特性,测量了它们的透射光谱和电阻率随薄膜中的氧含量及热处理温度的变化
关键词 NiOx薄膜加热氧化光电特性    
Abstract:The thin films of NiOx, which thickness smaller than 0.1μm,were prepared by reactive sputtering of a Ni target with a mixed gas of argon and oxygen. The samples then were heated in air. It was found that the transmissivity and conductivity of the samples
Key wordsthin film of NiO_x oxidation photoelectronic properties
收稿日期: 1997-04-25     
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