材料研究学报  1996, Vol. 10 Issue (3): 279-284

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热丝法化学气相沉积大面积金刚石膜中辐射场和温度场的尺寸效应

刘德义;黄荣芳;于杰;闻立时;师昌绪

中国科学院金属研究所

SIZE EFFECT OF IRRADIANCE AND TEMPERATURE FIELDS IN LARGE AREA DIAMOND GROWTH BY HFCVD

LIU Deyi;HUANG Rongfang;YU Jie;WEN Lishi;SHI Changxu(Institute of Metal Research.Chinese Academy of Sciences)(Project No.59392800 of NSFC;also supported by Chinese Academy of Sciences and the Committee of Science and Technology of Liaoning Provice.Manuscr

刘德义;黄荣芳;于杰;闻立时;师昌绪. 热丝法化学气相沉积大面积金刚石膜中辐射场和温度场的尺寸效应[J]. 材料研究学报, 1996, 10(3): 279-284.
, , , , . SIZE EFFECT OF IRRADIANCE AND TEMPERATURE FIELDS IN LARGE AREA DIAMOND GROWTH BY HFCVD[J]. Chin J Mater Res, 1996, 10(3): 279-284.

摘要 参考文献 相关文章 Metrics 全文: PDF(392 KB)   摘要: 对热丝法化学气相沉积金刚石膜中的辐射场和温度场进行了计算结果表明,在样品平面沿X,Y方向均匀辐照度(温度)区的线性尺寸比高温度梯度区的尺寸快速增大沿Z方向均匀辐照度(温度)区的深度随样品到加热丝距离的增加而增大辐照度(温度)的大小可通过改变加热丝间距得到控制. 关键词 ： 辐照场,  金刚石膜生长,  HFCVD     Abstract：Irradiance and temperature fields are calculated for large area diamond growth by HFCVD.The results show that linear size of uniform irradiance(temperature) region in X and Y directions in sample plane increases more quickly than that of region of high ir Key words： irradiance field diamond growth HFCVD 收稿日期: 1996-06-25      服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 刘德义 黄荣芳 于杰 闻立时 师昌绪 44.8K 链接本文: https://www.cjmr.org/CN/      或      https://www.cjmr.org/CN/Y1996/V10/I3/279 1PlankM．TheTheoryofHeatRadiation．NewYork:DoverPublication,19592RohsenowWM,HartnettJP,GanicENetal．HandbookofHeatTransferFoundamentalSeeed,McGraw-Hill,1985f No related articles found! Viewed Full text Abstract Cited   Shared      Discussed