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材料研究学报  1989, Vol. 3 Issue (3): 233-236    
  研究论文 本期目录 | 过刊浏览 |
离子束溅射法制备YBa_2Cu_3O_(7-x)超导薄膜
胡倾宇;闻立时;赵航炜;乔桂文钱声伟;于宝海;杨巧勤;庄育智
中国科学院金属研究所;中国科学院金属研究所;中国科学院金属研究所;中国科学院金属研究所;中国科学院金属研究所;中国科学院金属研究所;中国科学院金属研究所
PREPARATION OF YBa_2Cu_3O_(7-x) SUPER-CONDUCTOR THIN FILM BY ION BEAM SPUTTERING
HU Qingyu WEN Lishi ZHAO Hangwei QIAO Guiwen QIAN Shengwei YU Baohai YANG Qiaoqin ZHUANG Yuzhi (Institute of Metal Research;Academia Sinica)
引用本文:

胡倾宇;闻立时;赵航炜;乔桂文钱声伟;于宝海;杨巧勤;庄育智. 离子束溅射法制备YBa_2Cu_3O_(7-x)超导薄膜[J]. 材料研究学报, 1989, 3(3): 233-236.
, , , , , , . PREPARATION OF YBa_2Cu_3O_(7-x) SUPER-CONDUCTOR THIN FILM BY ION BEAM SPUTTERING[J]. Chin J Mater Res, 1989, 3(3): 233-236.

全文: PDF(251 KB)  
摘要: 采用YBa_2Cu_3O_(7-x)靶材,用离子束溅射法在多种衬底上得到了接近化学计量的YBa_2Cu_3O_(7-x)单相超导薄膜。
关键词 超导薄膜离子束溅射法    
Abstract:A preliminary investigation of Y-Ba-Cu-O superconductorthin films deposited on different substrate by ion beam sputtering was reported.The experimental results show that this method provides a bette wayto obtain stoichiometric YBa_2Cu_3O_(7-x) superconduc
Key wordssuperconductor f(?)lml    (?)on beam sputting
收稿日期: 1989-06-25     
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