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Si/Ag/Si近红外透明导电薄膜的双S枪直流磁控溅射淀积 |
叶志镇;唐晋发 |
浙江大学;浙江大学 |
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引用本文:
叶志镇;唐晋发. Si/Ag/Si近红外透明导电薄膜的双S枪直流磁控溅射淀积[J]. 材料研究学报, 1988, 2(4): 94-95.
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[J]. Chin J Mater Res, 1988, 2(4): 94-95.
1 叶志镇.激光与红外,1987;17(3) :46 |
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