ELECTRICAL AND OPTICAL PROPERTIES OF a-Si:H/a-Si_(1-X)C_x:H MULTILAYERS

Chin J Mater Res

1989, Vol. 3

Issue (1): 65-70 DOI:

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ELECTRICAL AND OPTICAL PROPERTIES OF a-Si:H/a-Si_(1-X)C_x:H MULTILAYERS

PENG Qicai ZHOU Xinming CAI Boxun (Sichuan University;Chengdu)

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PENG Qicai ZHOU Xinming CAI Boxun (Sichuan University;Chengdu). ELECTRICAL AND OPTICAL PROPERTIES OF a-Si:H/a-Si_(1-X)C_x:H MULTILAYERS. Chin J Mater Res, 1989, 3(1): 65-70.

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Abstract The a-Si:H/a-Si_(1-x)C_x:H multilayers synthesized by RFglow dischargedeposition in a single-chamber plasma reacter have shownlower darkconductivity,higher photoconductivity and apparent S-W effectother than unlayered samples.With decreasing the sublayer

Key words: a-SiH/a-Si_(1-x)-C_xH superlattice amorphous semiconductors electrical properties optical properties

Received: 25 February 1989

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