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Chin J Mater Res  1989, Vol. 3 Issue (3): 233-236    DOI:
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PREPARATION OF YBa_2Cu_3O_(7-x) SUPER-CONDUCTOR THIN FILM BY ION BEAM SPUTTERING
HU Qingyu WEN Lishi ZHAO Hangwei QIAO Guiwen QIAN Shengwei YU Baohai YANG Qiaoqin ZHUANG Yuzhi (Institute of Metal Research;Academia Sinica)
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HU Qingyu WEN Lishi ZHAO Hangwei QIAO Guiwen QIAN Shengwei YU Baohai YANG Qiaoqin ZHUANG Yuzhi (Institute of Metal Research;Academia Sinica). PREPARATION OF YBa_2Cu_3O_(7-x) SUPER-CONDUCTOR THIN FILM BY ION BEAM SPUTTERING. Chin J Mater Res, 1989, 3(3): 233-236.

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Abstract  A preliminary investigation of Y-Ba-Cu-O superconductorthin films deposited on different substrate by ion beam sputtering was reported.The experimental results show that this method provides a bette wayto obtain stoichiometric YBa_2Cu_3O_(7-x) superconduc
Key words:  superconductor f(?)lml      (?)on beam sputting     
Received:  25 June 1989     
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https://www.cjmr.org/EN/     OR     https://www.cjmr.org/EN/Y1989/V3/I3/233

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