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Chin J Mater Res  1995, Vol. 9 Issue (1): 50-54    DOI:
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PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS
JIANG Enyong;LIU Hui;LIU Mingsheng;LIN Chuan(Tianjin University)SUN Duochun(Tsinghua University)(Correspondent:JIANG Enyong; Department of Applied Physics; Tianjin University; Tianjin 300072)
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JIANG Enyong;LIU Hui;LIU Mingsheng;LIN Chuan(Tianjin University)SUN Duochun(Tsinghua University)(Correspondent:JIANG Enyong; Department of Applied Physics; Tianjin University; Tianjin 300072). PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS. Chin J Mater Res, 1995, 9(1): 50-54.

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Abstract  In this paper. the functionally gradient iron nitrides thin films were prepared by facing targets sputtering. Rutherford backscattering spectrometry (RBS) demonstrates that the concentration of Fe or N atoms varies gradually from the substrate to the surf
Key words:  facing targets sputtering;iron nitrides thin films;functionally gradient thin films;Rutherford backscattering spectrometry     
Received:  25 February 1995     
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