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DEPOSITION AND PROPERTIES OF AMORPHOUS CARBON NITRIDE FILMS |
WEI Aixiang;CHEN Dihu;ZHOU Youguo;LIN Liping;PENG Shaoqi(Zhongshan University Guangzhou Naval Academy ; Guangzhou 510431) |
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Cite this article:
WEI Aixiang;CHEN Dihu;ZHOU Youguo;LIN Liping;PENG Shaoqi(Zhongshan University Guangzhou Naval Academy ; Guangzhou 510431). DEPOSITION AND PROPERTIES OF AMORPHOUS CARBON NITRIDE FILMS. Chin J Mater Res, 1998, 12(5): 523-526.
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Abstract Amorphous carbon nitride films have been formed by magnetic field filtered carbon ion deposition. The optical and electrical characteristics of samples deposited in different N2 partial pressure have been studied using FTlR, XPS, optical absorption spectr
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Received: 25 October 1998
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