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THE STRUCTURE AND PROPERTIES OF AMORPHOUS Ge/SiO_2 SUPERLATTICES |
ZHANG Xinwang;CHEN Guanghua( Dept-of Phgsics; Lanchou University; Lanzhou 730000Dept. of Applied Phgsics; Beijing Polytechnic University; Beijing; 100022) |
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Cite this article:
ZHANG Xinwang;CHEN Guanghua( Dept-of Phgsics; Lanchou University; Lanzhou 730000Dept. of Applied Phgsics; Beijing Polytechnic University; Beijing; 100022). THE STRUCTURE AND PROPERTIES OF AMORPHOUS Ge/SiO_2 SUPERLATTICES. Chin J Mater Res, 1998, 12(5): 512-514.
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Abstract The amorphous Ge/SiO2 superlattices have been prepared by rf sputtering with poIycrystalline Ge and quata targets in Ar ambient. Small angle X-ray diffraction measurement was carried to invedigate the structure of the samples, the results indicate the abr
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Received: 25 October 1998
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