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| 碳离子注入对硅片微摩擦学行为的影响 |
| 张德坤 葛世荣 |
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引用本文:
张德坤; 葛世荣 . 碳离子注入对硅片微摩擦学行为的影响[J]. 材料研究学报, 2007, 21(4): 384-388.
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