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材料研究学报  2007, Vol. 21 Issue (2): 194-198    
  论文 本期目录 | 过刊浏览 |
硝磷酸腐蚀对CdTe薄膜性能及背接触层的影响
李卫  冯良桓  郝瑞英  陈茜
引用本文:

李卫; 冯良桓; 郝瑞英; 陈茜 . 硝磷酸腐蚀对CdTe薄膜性能及背接触层的影响[J]. 材料研究学报, 2007, 21(2): 194-198.

全文: PDF(758 KB)  
摘要: 采用硝磷酸(NP)背表面刻蚀工艺并结合真空共蒸发法分别沉积了几种背接触层材料,研究了NP腐蚀对CdTe薄膜性能及背接触层的影响.结果表明:NP腐蚀后在CdTe薄膜上产生了富碲层;退火后,碲容易与背接触材料中的铜反应生成CuxTe.通过严格控制和优化腐蚀工艺,选择ZnTe/ZnTe:Cu作为背接触层材料,可制备出优异性能的CdTe太阳电池.
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收稿日期: 1900-01-01     
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