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材料研究学报  1988, Vol. 2 Issue (4): 1-10    
  研究论文 本期目录 | 过刊浏览 |
光化学气相沉积非晶硅和微晶硅太阳电池的发展
李文范;刘秀英
中国科学院长春应用化学研究所;中国科学院长春应用化学研究所
THE DEVELOPING TREND OF AMORPHOUS SILICON AND MICROCRYSTALLINE SILICON SOLAR CELLS PREPARED BY THE PHOTOCHEMICAL VAPOR DEPOSITION
LI Wenfan;LIU Xiuying(Changchun Institute of Applied Chemistry;Academia Sinica)
引用本文:

李文范;刘秀英. 光化学气相沉积非晶硅和微晶硅太阳电池的发展[J]. 材料研究学报, 1988, 2(4): 1-10.
, . THE DEVELOPING TREND OF AMORPHOUS SILICON AND MICROCRYSTALLINE SILICON SOLAR CELLS PREPARED BY THE PHOTOCHEMICAL VAPOR DEPOSITION[J]. Chin J Mater Res, 1988, 2(4): 1-10.

全文: PDF(739 KB)  
摘要: 本文综述了光化学气相沉积(Photo-CVD)法分解硅烷(SiH_4、Si_2H_6)制备非晶硅(a-Si)膜的简单原理、a-Si 膜的性质、a-Si 和微晶硅(μc-Si)太阳电池的光伏特性。也介绍了a-Si 和μc-Si 太阳电池制备技术和发展现状。并指出Photo-CVD 法是制备高转换效率(η)太阳电池很有希望的一种方法。
Abstract:In this paper,the brief principle of amorphous silicon(a-Si)films fab-ricatedby the photochemical vapor deposition using decomposition of monosilaneand disilane is reviewed.The electrical and optical properties of a-Si filmsand the photovoltaic properties
收稿日期: 1988-08-25     
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