材料研究学报  1995, Vol. 9 Issue (1): 50-54

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氮化铁梯度薄膜的制备

姜恩永;刘晖;刘明升;林川;孙多春

天津大学;清华大学

PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS

JIANG Enyong;LIU Hui;LIU Mingsheng;LIN Chuan(Tianjin University)SUN Duochun(Tsinghua University)(Correspondent:JIANG Enyong; Department of Applied Physics; Tianjin University; Tianjin 300072)

姜恩永;刘晖;刘明升;林川;孙多春. 氮化铁梯度薄膜的制备[J]. 材料研究学报, 1995, 9(1): 50-54.
, , , , . PREPARATION OF FUNCTIONALLY GRADIENT IRON NITRIDES THIN FILMS[J]. Chin J Mater Res, 1995, 9(1): 50-54.

摘要 参考文献 相关文章 Metrics 全文: PDF(443 KB)   摘要: 用对向靶溅射仪制备了具有梯度结构的氮化铁薄膜材料.卢瑟福背散射分析结果表明,铁、氮两种原子的密度沿膜厚度方向呈梯度变化.在薄膜中有ζ-Fe2N,ε-FexN(2 关键词 ： 对向靶溅射,  氮化铁薄膜,  梯度薄膜,  卢瑟福背散射     Abstract：In this paper. the functionally gradient iron nitrides thin films were prepared by facing targets sputtering. Rutherford backscattering spectrometry (RBS) demonstrates that the concentration of Fe or N atoms varies gradually from the substrate to the surf Key words： facing targets sputtering;iron nitrides thin films;functionally gradient thin films;Rutherford backscattering spectrometry 收稿日期: 1995-02-25      基金资助:国家自然科学基金 服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 姜恩永 刘晖 刘明升 林川 孙多春 44.8K 链接本文: https://www.cjmr.org/CN/      或      https://www.cjmr.org/CN/Y1995/V9/I1/50 1SugitaY,MitsuokaK,KomuroM,HoshiyaH,KozonoY,HanazonoM．JApplPhys,1991;70(10):59772JiangEnyong,SunChangqing,LiJine,Liuyuguang．JApplPhys,1989;65(4):1959．3KumeM,TsujiokaT,MatsuuraK,AbeY,TasakiA．IEEETransonMagn,1987;MAG-23(5):36334BainbridgeJ,CbanningDA,WhitlowWH,PendlebutyRE．JPhysChemSolides,1973;34(1):2965SakumaA．JMagnMagnMater,1991;102(Nos1&2):1276KomutoM,KozonoY,HanozonoM,Sugitay．JApplPhys,1990;67(9):51267TakabashiM,FujiiH,NakagawaH,NaSuS,KanamaruF．Structureandelectronicandmagneticpropertiesoftputter—depositednewironmindes．Ferntes:Procof6thInterConfonFerntes(ICF6),TokyoandKyoto,Japen,1992:5088MarunoS,BanS,WangYF,IwataH,ItchH．JCeramSocJpn,1992;100(4):362 [1] 王怡; 姜恩永; 白海力; 吴萍 . 对向靶溅射制备CN膜的键态[J]. 材料研究学报, 1999, 13(5): 549-551. [2] 冉均国; 杨云志; 郑昌琼 . 梯度薄膜材料设计原则[J]. 材料研究学报, 1999, 13(3): 309-312. [3] 乔学亮;候晏红;吴一平;陈建国;孙培祯. Ti-Al—N系功能梯度薄膜的相结构[J]. 材料研究学报, 1996, 10(3): 310-312. [4] 柳襄怀;杨根庆;王曦;郑志宏;黄巍;邹世昌. 离子束增强沉积形成梯度薄膜[J]. 材料研究学报, 1994, 8(1): 61-66. Viewed Full text Abstract Cited   Shared      Discussed