材料研究学报  1997, Vol. 11 Issue (1): 81-84

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无定形金刚石膜的光学性质

魏爱香;陈弟虎;彭少麒

中山大学物理系;广州市;510275;中山大学;中山大学

OPTICAL PROPERTIES OF AMORPHOUS DIAMOND FILM

WEI Aixian;CHEN Dihu;PEN Shaoqi(Zhongshan University)

魏爱香;陈弟虎;彭少麒. 无定形金刚石膜的光学性质[J]. 材料研究学报, 1997, 11(1): 81-84.
, , . OPTICAL PROPERTIES OF AMORPHOUS DIAMOND FILM[J]. Chin J Mater Res, 1997, 11(1): 81-84.

摘要 参考文献 相关文章 Metrics 全文: PDF(299 KB)   摘要: 采用磁过滤真空溅射离子沉积技术,研究了不同衬底负偏压下制备的样品的吸收光谱和光能隙,用632.8nm的椭圆偏振仪测量了膜的厚度和折射率.结果表明:衬底负偏压Vb在-50—20V范围内制备的样品,其光吸收主要是态的吸收,膜中有较多的SP3组份,光能降为3.1～3.4eV,形成无定形金刚石薄膜(a—D) 关键词 ： 无定形金刚石膜,  离子技术,  吸收光谱     Abstract：Amorphous diamond film (a-D) were prepared by deposition from magnetic filtered ions sputtering from graphite. The optical absorption spectra of a-D film deposited in diffrent substrate bias voltage condition were investigated. Thickness and refractive i Key words： amorphous diamond film ionic technology absorption spectra 收稿日期: 1997-02-25      基金资助:广东省高教局重点学科基金 服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 魏爱香 陈弟虎 彭少麒 44.8K 链接本文: https://www.cjmr.org/CN/      或      https://www.cjmr.org/CN/Y1997/V11/I1/81 1.V.S.Veerasamy,G.A.J.Amaratunga,J.Rebertson,Journal ofNon—Crystalinesolids,164-166,1111(1993) 2.G.A.J.Amaratunga,V.S.Veersamy,C.A.Davi,Journal of Non—Crystaline Solids,164-166,11 19(1993) 3.K.W.R.Gilkes,P.H.Gaskell,1.Yuan,Journal of Non—Crystaline Solids,164-166,1107(1993) 4. D.DasguPta,FDemichelis,C.FPirri,ATagliaferre.PhysicsReview,B43,Z131(1991) 5.Shaoqi Peng,Yanxla Tao,Xuguang Huang,Journal Mtg.ofTheChlnesePhys.Socletleslstlnt.Conf.onFrotlersof Phys, to be published by World Set. Press 6. V. S. Veerasamy, G. A.J、 Amaratunga, M. I. Mime, P、Hewitt, Diamond and Related Materials, 2,782(1993) 7 D. R. Mckenzir, Y Yin, N.A.Marks, C.A.Davis, E.Kravtchinskaia, Journal of Non—Crystaline Solids, 164～166,1101(1993) No related articles found! Viewed Full text Abstract Cited   Shared      Discussed