β-SiC半导体器件在滑动摩擦中材料去除行为的纳观分析

施渊吉, 程诚, 张海涛, 胡道春, 陈晶晶, 黎军顽

Nanoscale Analysis of Material Removal Behavior of β-SiC Semiconductor Devices during Sliding Wear

SHI Yuanji, CHENG Cheng, ZHANG Haitao, HU Daochun, CHEN Jingjing, LI Junwan

图1 β-SiC纳米滑动摩擦三维分子动力学模型

Fig.1 Three dimensional model of β-SiC constructed by molecular dynamics method (a) β-SiC atomic model, (b) schematic diagram of sliding friction